Thermal IR Detection With Nanoelectromechanical Silicon Nitride Trampoline Resonators

Nanoelectromechanical (NEMS) resonators are promising uncooled thermal infrared (IR) detectors to overcome existing sensitivity limits. Here, we investigated NEMS trampoline made of silicon nitride (SiN) as IR detectors. Trampolines have an enhanced responsivity more than two orders magnitude compared state-of-the-art SiN drums. The characterized yield a in terms noise equivalent power (NEP) 7 pW/ $\sqrt {\text {Hz}}$ and response time low 4 ms. detector area features impedance-matched metal thin-film absorber with spectrally flat absorption 50% over the entire mid-IR spectral range from 1 25 notation="LaTeX">$\mu \text{m}$ .